[ MENU ] [ ENG ] [ JPN ] 単元素固体のスパッタリング収率 （エネルギー，入射角依存性）
（参考文献）

---

Atomic Number of Incident Ion, Z₁ = (1 <= Z₁ <= 83)
Atomic Number of Target Atom, Z₂ = (4 <= Z₂ <= 92)
Incident Angle [deg] = ( < 90 ), Energy [eV] =
fs = 　( 1.5 <= fs <= 2.0, see Reference 2 )
Cursor　 　 energy angle

by 井上雅彦 2021, 小阪宗嗣 2006, Setsunan University

---

Reference 1

Y.Yamamura and H.Tawara
Atomic Data and Nuclear Data Tables, 62(1996)149-253.
"Energy Dependence of the Ion-induced Sputtering Yields of Monatomic Solids at Normal Incidence"

Reference 2

Y.Yamamura, Y.Itikawa and N.Itoh, IPPJ-AM-26(1983).
"Angular Dependence of Sputtering Yields of Monatomic Solids"