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クラスタイオンによる非線形スパッタリング収率 （エネルギー，入射角依存性）
（参考文献）
Atomic Number of Incident Ion, Z1 = (1 <= Z1 <= 83)
Atomic Number of Target Atom, Z2 = (4 <= Z2 <= 92)
Incident Angle [deg] = ( < 90 ), Energy [eV/cluster] =
Spike Temp.[K] = , Cluster Size [atoms/cluster] =
fs = 　( 1.5 <= fs <= 2.0, see Reference 3 )
Cursor　 　 energy angle

by 尼丁健太朗 2020, 大杉祐文 2008, 摂南大学

Reference 1

P.Sigmund & C.Claussen, J. Appl. Phys, 52(1981)204-213.

Reference 2

Y.Yamamura and H.Tawara
Atomic Data and Nuclear Data Tables, 62(1996)149-253.
"Energy Dependence of the Ion-induced Sputtering Yields of Monatomic Solids at Normal Incidence"

Reference 3

Y.Yamamura, Y.Itikawa and N.Itoh, IPPJ-AM-26(1983).
"Angular Dependence of Sputtering Yields of Monatomic Solids"