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オージェ定量分析のための背面散乱補正係数

参考文献
入射電子エネルギー, Ep [eV] = ( 3000 <= Ep <= 30000 )
内殻励起エネルギー, Ec [eV] = ( Ep / 100 <= Ec <= Ep / 1.5 )
標的元素の原子番号, Z = ( <= 100 )
入射角, alpha [deg] = ( <= 60 )
Cursor

Incident Angle   Atomic Number

by 豊岡治伎 2020, 足立智大 2007, 伊藤健大 2001, 摂南大学


参考文献

Sigeo Tanuma
Journal of Surface Analysis Vol.14, No.1 (2007) pp.9-19.
"Backcattering Correction for Auger Electron Spectroscopy
1.Development of an Improved Backscattering Correction
Equation for Wide Analytical Conditions"