Back Scattering Correction Factor for Quatitative Analysis by AES

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Back Scattering Correction Factor for Quantitative AES
Reference
Primary Electron Energy, E_p [eV] = ( 3000 <= E_p <= 30000 )
Core Excitation Energy, E_c [eV] = ( E_p / 100 <= E_c <= E_p / 1.5 )
Atomic Number of Target, Z = ( <= 100 )
Incident Angle, alpha [deg] = ( <= 60 )
Cursor

Incident Angle　　 Atomic Number

by H. Toyooka 2020, T. Adachi 2007, T. Ito 2001, Setsunan University,

Reference
Sigeo Tanuma
Journal of Surface Analysis Vol.14, No.1 (2007) pp.9-19.
"Backcattering Correction for Auger Electron Spectroscopy
1.Development of an Improved Backscattering Correction
Equation for Wide Analytical Conditions"