Reference

Journal of Surface Analysis 10 (2003) 197-202.

Focusing and positioning of Ion Beam for Sputter Depth Profiling
using a Coaxial Sample Stage and a Dual Nano-ammeter

Masahiro Inoue, Kazuyuki kurahishi, and Keiji Kodama

Setunan University,Ikedanakamachi 17-8,Neyagawa,Osaka 572-8508,Japan