ＡＥＳ定量分析のための背面散乱補正係数，原子番号＆入射角依存性
Back Scattering Corretion Factor for Quantitative Analysis by AES
Z & incident-angle dependence (Reference)

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by T.Adachi 2007, Setsunan University

Reference

Backcattering Correction for Auger Electron Spectroscopy
1.Development of an Improved Backscattering Correction
Equation for Wide Analytical Conditions
Journal of Surface Analysis Vol.14,No.1(2007)pp.9-19

Sigeo Tanuma

Material analysis station & Advanced nano characterization center, National Institute for Material Science,
1-2-1 Sengen,Tsukuba,Ibaraki 305-0047,Japan