イオンによる単元素固体のスパッタリング収率と、スパッタ深さ方向分析における深さ分解能
Ion-induced Sputtering Yields of Monatomic Solids(Reference1)
and
Broadening by Cascade Mixing in Sputter Depth Profiling(Reference2)
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Reference 1

Atomic Data and Nuclear Data 31(1984)1-80.

"Energy Dependence of the Ion-induced Sputtering Yields of Monatomic Solids"

N.Matsunami, Y.Yamamura, Y.Itikawa, N.Itoh, Y.Kazumata, S.Miyagawa, K.Morita, R.Shimizu and H.Tawara

Institute of Plasma Physics, Nagoya University
Chikusa-ku, Nagoya 464, Japan

Reference 2

Appl.Phys.18(1979)131-140.

"The Depth Resolution of Sputter Profiling"

H.H. Andersen

Institute of Physics, University of Aarhus, DK-8000 Aarhus C, Denmark